fig16

Microstructural evolution and ferroelectricity in HfO<sub>2 </sub>films

Figure 16. (A) Schematic top view of an HZO crystal on a LSMO(001) surface. (B) Cross-sectional STEM-HAADF image of HZO/LSMO heterostructure showing HZO crystal variants of the [$$\bar 2$$11] and [0$$\bar 1$$1] types. Reconstructed image from reflections in Fourier space corresponding to ($$\bar 1$$11) HZO and (110) LSMO planes. (inset) Fast Fourier transformation of both HZO and LSMO. Planes in the HZO layer are shown in yellow, while planes in the LSMO are given in white[68]. HZO: Hf0.5Zr0.5O2; LSMO: La0.7Sr0.3MnO3; STEM-HAADF: scanning transmission electron microscopy-high angle annular dark-field.

Microstructures
ISSN 2770-2995 (Online)
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