fig17
Figure 17. (A) Plan-view SAED pattern and (B) representative cross-sectional STEM-HAADF image of a 4-nm-thick film. (C) Cross-sectional STEM-HAADF image from a 9-nm-thick HZO sample. (D) STEM-HAADF image observed along STO [100] (the STO substrate is not shown in the images), revealing an interfacial T-phase layer of HZO[29]. SAED: Selected-area electron diffraction; STEM-HAADF: scanning transmission electron microscopy-high angle annular dark-field; HZO: Hf0.5Zr0.5O2; STO: SrTiO3.
