fig3
Figure 3. Projections of crystal structures of HfO2 with three O-phases along the [010] axis. The arrangements of O atoms in the black rectangles are different among (A) Pbcm, (B) Pbca and (C) Pca21. (D) STEM-HAADF image of HZO phase projected along [010] zone axis. Scale bar of 1 nm. (E) STEM-ABF image of (D) with the inset being a simulated ABF image. Scale bar is 1 nm[99]. STEM-HAADF: Scanning transmission electron microscopy-high angle annular dark-field; HZO: Hf0.5Zr0.5O2; ABF: annular bright-field.
