fig7

Figure 7. (A) Switchable polarization P_SW of HfO₂ films as a function of doping concentration for different dopants: Sc, Y, Si, Ge, Zr and N. (B) O-, T- and C-phase fraction of HfO₂ films as a function of doping concentrations for various dopants. (C) P_SW as a function of the M-phase fraction for HfO₂ films with various dopants. (D) O-, T- and C-phase (111) peak positions as a function of the fraction of the M-phase for various dopants. The red and green arrows represent theoretical values for FE O-phase and non-FE T-phase, respectively^[114]. P_SW: switchable polarization; FE: ferroelectric.